Integrated films of transition metal oxides for information technology
نویسندگان
چکیده
منابع مشابه
Transition metal oxides: extra thermodynamic stability as thin films.
The oxides of many transition metals wet their own metal surface. The adhesion energy at this interface (E(adh,ox/m)) provides extra stabilization, which lowers the O2 pressure required for oxide stability as a thin film below that required for bulk-oxide stability by the factor exp[(2gamma(g/ox) - E(adh,ox/m))/(tN(ox)RT)], where gamma(g/ox) is the surface energy of the oxide, t is the oxide fi...
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ژورنال
عنوان ژورنال: Microelectronic Engineering
سال: 2015
ISSN: 0167-9317
DOI: 10.1016/j.mee.2015.04.090